APC butterfly valves
These high-functioning APC valves, developed for the CVD/ALD processes used in the semiconductor manufacturing process, have a maximum set temperature of 190°C, 3 million cycles durability, and three functions (sealing, slow exhaust, pressure regulation) with a high-speed open/close function.
Newly developed seat ring mechanism
The newly developed seat ring mechanism eliminates problems with the O-ring mounted on the flapper, such as torsion or falling out. Also, the flapper seal is grease-free to protect the reaction chamber from contamination.
The seat ring mechanism reduces stress on the O-ring, providing high durability.
Full opening/closing operation: 3 million cycles
Reduces internal byproducts with proprietary heating
By heating not only the body but also the flapper interior, excellent adaptability is achieved for processes that involve a large amount of byproducts. (Optional)
(2) Power cable
(3) Interface communication
(5) Sensor input
(6) Micro connector terminal
The interface changes according to the communication format.
The photo shows DeviceNet™.