주목 제품

The structure enables heating from within the valve, previously impossible with conventional products. Therefore, reaction byproduct adhesion is dramatically reduced, sharply extending maintenance periods and preventing particle reverse expansion.

Bellows internal heater (patented) and external heater temperature can be individually set.

The internal heater can be operated integrally with the valve body, heating both the valve body and the bellows at once whether the valve is open or closed.

Ideal for processes such as metal etching, CVD, and ALD.

Supports flanges including ISO-KF, JIS-VF, ConFlat rotating flanges, ISO-MF, and so on.

A connector can be mounted on the heater and thermocouple cable as well.

These non-sliding HOT gate valves have an internal heater and gate heating structure.

The body and valve body can be heated up to 180°C, making them optimal for high-temperature processes such as metal CVD equipment. Temperature control is handled through separate channels for the body and valve body, enabling individual setting.

The bellows seal method is used to enhance durability when heated.

Periodic maintenance achieves a mechanism durability life of 1 million cycles.

O-ring materials available include fluorine rubber and Kalrez　manufactured by DuPont.* Other O-ring materials are also available; consult us as needed.

In emergencies such as cutoff drive air, a latch-lock mechanism keeps the valve closed.

The full-bore structure has high conductance and effectively suppresses the accumulation of byproducts, suited to exhaust lines for CVD equipment, etc.

The ball seat uses Hypatite PTFE with excellent durability and heat resistance, enabling use up to a maximum fluid temperature of 200°C.

Disassembly, cleaning, and packing replacement are possible.

The heater temperature can be set up to 200°C.