--- title: 진공계 히터 장착 밸브 ｜주식회사 KITZ SCT description: 주식회사 KITZ SCT의 ‘진공계 히터 장착 밸브 ’ 페이지입니다. KITZ SCT는 밸브종합메이커'KITZ그룹'의 일원으로써, 반도체 프로세스용 밸브를 비롯하여 유체제어기기와 장치의 개발, 제조, 판매, 서비스를 일관체제로 제공하고 있습니다. image: https://kr.kitzsct.com/hubfs/assets/images/ogp.jpg --- 제품 검색 Fitting Thermoplastic valve Vacuum valves Diaphragm valve Bellows valve Check valve Clean butterfly valve [ 형식 검색은 여기 ](https://kr.kitzsct.com/products/search/model) 각종 다운로드 - [![icon_01_catalog](https://kr.kitzsct.com/hubfs/images/home/icon_01_catalog.svg) 제품 카탈로그 ](https://kr.kitzsct.com/document#anchor01) - [![icon_02_cad](https://kr.kitzsct.com/hubfs/images/home/icon_02_cad.svg) CAD/도면 ](https://kr.kitzsct.com/document#anchor02) - [![icon_03_paper](https://kr.kitzsct.com/hubfs/images/home/icon_03_paper.svg) 각종 자료 ](https://kr.kitzsct.com/document#anchor03) - [![icon_04_technology](https://kr.kitzsct.com/hubfs/images/home/icon_04_technology.svg) 기술 자료 ](https://kr.kitzsct.com/document#anchor04) ## Valves with vacuum heaters - [L-type vacuum bellows heated valves](https://kr.kitzsct.com/products/highlight/11#anchor01) - [Square HOT gate valves](https://kr.kitzsct.com/products/highlight/11#anchor02) - [Vacuum flange HOT ball valves](https://kr.kitzsct.com/products/highlight/11#anchor03) ## L-type vacuum bellows heated valves ![L-type vacuum bellows heated valves](https://kr.kitzsct.com/hubfs/images/products/highlight/11/img_11_001_en.png) L-type vacuum bellows heated valves are vacuum valves with an embedded spiral heater following bellows movement, heating the valve body and bellows. Heating from within the bellows eliminates cold spots and enables reduced adhesion of generated material. ### Features ![L-type vacuum bellows heated valves](https://kr.kitzsct.com/hubfs/images/products/highlight/11/img_11_002.png) - The structure enables heating from within the valve, previously impossible with conventional products. Therefore, reaction byproduct adhesion is dramatically reduced, sharply extending maintenance periods and preventing particle reverse expansion. - Bellows internal heater (patented) and external heater temperature can be individually set. - The internal heater can be operated integrally with the valve body, heating both the valve body and the bellows at once whether the valve is open or closed. - Ideal for processes such as metal etching, CVD, and ALD. - Supports flanges including ISO-KF, JIS-VF, ConFlat rotating flanges, ISO-MF, and so on. - A connector can be mounted on the heater and thermocouple cable as well. ### Main specifications ![Main specifications](https://kr.kitzsct.com/hubfs/images/products/highlight/11/img_11_003_en.png) For details, see the product catalog. Access is also available via the button below. [Product catalogs ](https://kr.kitzsct.com/hubfs/20800877/pdf/general_catalog_en.pdf#page=83) ## Square HOT gate valves ![Square HOT gate valves](https://kr.kitzsct.com/hubfs/images/products/highlight/11/img_11_004_en.png) The UXG and LG Series include square gate valves developed for partitions between semiconductor vacuum equipment reactors and transfer chambers. With internal heaters equipped in the body and interior, they are characterized by high thermal uniformity, enabling temperature setting as required up to 180°C. ### Features - These non-sliding HOT gate valves have an internal heater and gate heating structure. - The body and valve body can be heated up to 180°C, making them optimal for high-temperature processes such as metal CVD equipment. Temperature control is handled through separate channels for the body and valve body, enabling individual setting. - The bellows seal method is used to enhance durability when heated. - Periodic maintenance achieves a mechanism durability life of 1 million cycles. - O-ring materials available include fluorine rubber and Kalrez　manufactured by DuPont.* Other O-ring materials are also available; consult us as needed. - In emergencies such as cutoff drive air, a latch-lock mechanism keeps the valve closed. ### Main specifications ![Main specifications](https://kr.kitzsct.com/hubfs/images/products/highlight/11/img_11_005_en.png) For details, see the product catalog. Access is also available via the button below. [Product catalogs ](https://kr.kitzsct.com/hubfs/20800877/pdf/general_catalog_en.pdf#page=91) ## Vacuum flange HOT ball valves ![Vacuum flange HOT ball valves](https://kr.kitzsct.com/hubfs/images/products/highlight/11/img_11_006_en.png) These ball valves have a full-bore structure and heater, effectively suppressing the accumulation of byproducts which can cause trouble in MOCVD equipment in chemical compound semiconductor manufacturing processes, abatement systems in solar cell and FPD manufacturing processes, and so on. ### Features ![Vacuum flange HOT ball valves](https://kr.kitzsct.com/hubfs/images/products/highlight/11/img_11_007.png) - The full-bore structure has high conductance and effectively suppresses the accumulation of byproducts, suited to exhaust lines for CVD equipment, etc. - The ball seat uses Hypatite PTFE with excellent durability and heat resistance, enabling use up to a maximum fluid temperature of 200°C. - Disassembly, cleaning, and packing replacement are possible. - The heater temperature can be set up to 200°C. ### Main specifications Size Manual: 15A/25A/40A/50A/65A/100A Automatic: 25A/40A/50A Operation type Manual, automatic (NC) Heater voltage Can be set as required Sealing material Shaft seal packing: PTFE Ball packing: Hypatite PTFE O-ring: High heat-resistance FKM Temperature specifications Set temperature: 200°C Contact our sales personnel for details. Inquiries can also be made via the button below. [Product catalogs ](https://kr.kitzsct.com/hubfs/20800877/pdf/general_catalog_en.pdf#page=82) [![CONTACT제품 전반에 대한 문의 KITZ SCT는 고객의 목적에 적합한 다양한 제품을 갖추고 있습니다. 언제든지 편안하게 상담해 주십시오. 문의처](https://no-cache.hubspot.com/cta/default/20800877/04ffd618-5cc7-4405-8047-782cc2358519.png)](https://cta-redirect.hubspot.com/cta/redirect/20800877/04ffd618-5cc7-4405-8047-782cc2358519)