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Ultra high purity gas products
Low-pressure diaphragm valves KD Series
![KD Series](https://kr.kitzsct.com/hubfs/images/products/highlight/14/img_14_001_en.jpg)
The KD Series includes compactly designed diaphragm valves.
Realizing high Cv values, they support semiconductor high purity gases. These high-reliability valves combine high durability and high corrosion resistance.
Features
With minimized body vertical hole dimensions, excellent gas replacement characteristics are realized through smaller interior volume
Realizes high sealing, high durability, degassing performance, and corrosion resistance through a proprietary gas-contact part seal structure
High corrosion resistance through carefully selected diaphragm materials and minimized individual variation through proprietary molding methods
Particle performance optimized through a clean manufacturing environment and interior polishing
Main specifications
![Main specifications](https://kr.kitzsct.com/hubfs/images/products/highlight/14/img_14_002_en.jpg)
For details, see the product catalog. Access is also available via the button below.
High-pressure diaphragm valves NRD Series
![NRD Series](https://kr.kitzsct.com/hubfs/images/products/highlight/14/img_14_003_en.jpg)
The NRD Series includes valves which support high pressures of 20.6 MPa.
With a slim and compact design, the lineup includes a wide range of flow rates from small flow to large flow types.
Features
Simple, compact design using a new high-output actuator and internal thread body structure
Lineup of high flow types NRHD4,
with a 1/4" size and a slim actuator of outer diameter 39.7 mm, realizes Cv 0.25 NRHD8,
with a 1/2" size, realizes a Cv 1.0 large flow; manual valves have low-torque handle operationSpringless diaphragm structure reduces particles
Main specifications
![Main specifications](https://kr.kitzsct.com/hubfs/images/products/highlight/14/img_14_004_en.jpg)
For details, see the product catalog. Access is also available via the button below.
Low-pressure zero volume valves ZCD Series
![ZCD Series](https://kr.kitzsct.com/hubfs/images/products/highlight/14/img_14_005_en.jpg)
The ZCD Series includes diaphragm valves with minimized internal dead volume (*A part) and enhanced gas replacement characteristics.
Features
Dead volume from seat to main flow path is minimized at valve closing, realizing superb gas replacement characteristics Reduced by 86% from our 1/4" KD type
Forcible lift of the lift part diaphragm prevents vacuum closure and improves opening speed
Replaceable structure allows users to replace the seat assembly
![Low-pressure zero volume valves ZCD Series](https://kr.kitzsct.com/hubfs/images/products/highlight/14/img_14_006_en.jpg)
Main specifications
![Main specifications](https://kr.kitzsct.com/hubfs/images/products/highlight/14/img_14_007_en.jpg)
For details, see the product catalog. Access is also available via the button below.
Low-pressure general-purpose diaphragm valves VLD Series
![VLD Series](https://kr.kitzsct.com/hubfs/images/products/highlight/14/img_14_008_en.jpg)
The VLD Series includes general-purpose diaphragm valves based on our KD Series, intended for ease of use and simplicity. The number of drive parts is minimized in order to simply the valve.
Features
The basic performance, materials, and cleanliness of the KD Series have been retained, while reviewing parts, changing machining methods, and reducing part counts, realizing safe and low-priced valves
Realizing reliability and durability equivalent to the conventional model, through equivalent cleaning and inspection processes
Particle performance optimized to support semiconductor high purity gas through highest-level manufacturing environments and interior polishing
Main specifications
![Main specifications](https://kr.kitzsct.com/hubfs/images/products/highlight/14/img_14_009_en.jpg)
For details, see the product catalog. Access is also available via the button below.
Mechanical metal gasket surface seal fittings CVC Series
![CVC Series](https://kr.kitzsct.com/hubfs/images/products/highlight/14/img_14_010.png)
The CVC Series includes mechanical metal gasket surface seal fittings which can be used in high purity gas piping, with our proprietary electropolishing surface treatment and cleanroom inspection and packaging.
Features
Components
![Components](https://kr.kitzsct.com/hubfs/images/products/highlight/14/img_14_011_en.jpg)
Female nut (NF): Female thread is given silver plating and seizing/galling prevention, ensuring solid tightening
Sleeve (S): Smooth interior finish with our proprietary electropolishing, etc.
Gasket (G): Made of nickel as standard, realizing high sealability with sleeve through tightening
Male nut (NM): Rolled screw use for high strength and solid connection
Main specifications
Product code list
![Product code list](https://kr.kitzsct.com/hubfs/images/products/highlight/14/img_14_012_en.jpg)
For details, see the product catalog. Access is also available via the button below.
Automatic welding fittings SCM/SCL Series, SCF Series
![SCM/SCL Series, SCF Series](https://kr.kitzsct.com/hubfs/images/products/highlight/14/img_14_013_en.jpg)
The SCM/SCL and SCF Series include high-quality automatic welding fittings with the excellent characteristics essential for high-purity, high-reliability semiconductor manufacturing processes.
Features
Use of refined stainless steel enabling excellent welding capacity for materials
Our unique electropolishing technology is available as an option for high purity gas piping applications
Product cleanliness is ensured by washing, inspection, and packaging in cleanrooms
With a neck (straight piping section) suited to automatic welding attached, high-quality welding is easy
Main specifications
SCM/SCL Series Product code list
![SCM/SCL Series Product code list](https://kr.kitzsct.com/hubfs/images/products/highlight/14/img_14_014_en.jpg)
SCF Series Product code list
![SCF Series Product code list](https://kr.kitzsct.com/hubfs/images/products/highlight/14/img_14_015_en.jpg)
For details, see the product catalog. Access is also available via the button below.